Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.
Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.
Jinsu Jeong, Jun-Sik Yoon, Seunghwan Lee, Rock-Hyun Baek. Comprehensive Analysis of Source and Drain Recess Depth Variations on Silicon Nanosheet FETs for Sub 5-nm Node SoC Application. IEEE Access, 8:35873-35881, 2020. [doi]
Abstract is missing.