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Research on "Cylinder-Four-Beam" Microstructure Improvement of MEMS Bionic Vector Hydrophone

Zeming Jian, Yifan Huang, Lei Nie, Mengran Liu, Guojun Zhang. Research on "Cylinder-Four-Beam" Microstructure Improvement of MEMS Bionic Vector Hydrophone. J. Sensors, 2021, 2021. [doi]

Authors

Zeming Jian

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Yifan Huang

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Lei Nie

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Mengran Liu

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Guojun Zhang

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