Research on "Cylinder-Four-Beam" Microstructure Improvement of MEMS Bionic Vector Hydrophone

Zeming Jian, Yifan Huang, Lei Nie, Mengran Liu, Guojun Zhang. Research on "Cylinder-Four-Beam" Microstructure Improvement of MEMS Bionic Vector Hydrophone. J. Sensors, 2021, 2021. [doi]

Abstract

Abstract is missing.