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Recent Research and Challenges in Multiple Patterning Layout Decomposition

Iris Hui-Ru Jiang, Hua-Yu Chang. Recent Research and Challenges in Multiple Patterning Layout Decomposition. In 2018 IEEE Computer Society Annual Symposium on VLSI, ISVLSI 2018, Hong Kong, China, July 8-11, 2018. pages 498-499, IEEE Computer Society, 2018. [doi]

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