Leyue Jiang, Yongyao Cai, Haidong Liu, Yang Zhao. A micromachined monolithic 3 axis accelerometer based on convection heat transfer. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 248-251, IEEE, 2013. [doi]
Abstract is missing.