Chunxia Jiang, Rongbin Li, Xin Wang, Hailong Shang, Yong Zhang 0003, Peter K. Liaw. Diffusion Barrier Performance of AlCrTaTiZr/AlCrTaTiZr-N High-Entropy Alloy Films for Cu/Si Connect System. Entropy, 22(2):234, 2020. [doi]
@article{JiangLWSZL20, title = {Diffusion Barrier Performance of AlCrTaTiZr/AlCrTaTiZr-N High-Entropy Alloy Films for Cu/Si Connect System}, author = {Chunxia Jiang and Rongbin Li and Xin Wang and Hailong Shang and Yong Zhang 0003 and Peter K. Liaw}, year = {2020}, doi = {10.3390/e22020234}, url = {https://doi.org/10.3390/e22020234}, researchr = {https://researchr.org/publication/JiangLWSZL20}, cites = {0}, citedby = {0}, journal = {Entropy}, volume = {22}, number = {2}, pages = {234}, }