Diffusion Barrier Performance of AlCrTaTiZr/AlCrTaTiZr-N High-Entropy Alloy Films for Cu/Si Connect System

Chunxia Jiang, Rongbin Li, Xin Wang, Hailong Shang, Yong Zhang 0003, Peter K. Liaw. Diffusion Barrier Performance of AlCrTaTiZr/AlCrTaTiZr-N High-Entropy Alloy Films for Cu/Si Connect System. Entropy, 22(2):234, 2020. [doi]

@article{JiangLWSZL20,
  title = {Diffusion Barrier Performance of AlCrTaTiZr/AlCrTaTiZr-N High-Entropy Alloy Films for Cu/Si Connect System},
  author = {Chunxia Jiang and Rongbin Li and Xin Wang and Hailong Shang and Yong Zhang 0003 and Peter K. Liaw},
  year = {2020},
  doi = {10.3390/e22020234},
  url = {https://doi.org/10.3390/e22020234},
  researchr = {https://researchr.org/publication/JiangLWSZL20},
  cites = {0},
  citedby = {0},
  journal = {Entropy},
  volume = {22},
  number = {2},
  pages = {234},
}