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Diffusion Barrier Performance of AlCrTaTiZr/AlCrTaTiZr-N High-Entropy Alloy Films for Cu/Si Connect System

Chunxia Jiang, Rongbin Li, Xin Wang, Hailong Shang, Yong Zhang 0003, Peter K. Liaw. Diffusion Barrier Performance of AlCrTaTiZr/AlCrTaTiZr-N High-Entropy Alloy Films for Cu/Si Connect System. Entropy, 22(2):234, 2020. [doi]

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