Wenlan Jiang, Chunpu Lv, Tao Zhang 0006, Huan-gang Wang. Phase Partition Based Virtual Metrology for Material Removal Rate Prediction in Chemical Mechanical Planarization Process. In Lu Fang, Yiran Chen, Guangtao Zhai, Z. Jane Wang 0001, Ruiping Wang 0001, Weisheng Dong, editors, Artificial Intelligence - First CAAI International Conference, CICAI 2021, Hangzhou, China, June 5-6, 2021, Proceedings, Part I. Volume 13069 of Lecture Notes in Computer Science, pages 180-190, Springer, 2021. [doi]
Abstract is missing.