Senlin Jiang, Dacheng Zhang, Zhenchuan Yang, Guizhen Yan. Design and fabrication of a novel silicon probe for micromachined surface profilers. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 941-944, IEEE, 2010. [doi]
Abstract is missing.