Robert W. Johnstone, M. Parameswaran. Curl and Effective Height of Micromachined Bi-Layer Cantilevers Under Differing Residual Stresses. In Proceedings of the Canadian Conference on Electrical and Computer Engineering, CCECE 2007, May 7, 10, 2006, Ottawa Congress Centre, Ottawa, Canada. pages 1617-1620, IEEE, 2006. [doi]
Abstract is missing.