Fabrication of SU-8 based Capacitive Micromachined Ultrasonic Transducer for low frequency therapeutic applications

Jose Joseph, Shiv Govind Singh, Siva Rama Krishna Vanjari. Fabrication of SU-8 based Capacitive Micromachined Ultrasonic Transducer for low frequency therapeutic applications. In 37th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2015, Milan, Italy, August 25-29, 2015. pages 1365-1368, IEEE, 2015. [doi]

Abstract

Abstract is missing.