P. C. Juan, K. C. Lin, H. Y. Chu, Y.-C. Kuo, H. W. Wang, T. Y. Shih. 2 dielectric layer sputtered with TiN or ZrN for sandwich-like metal-insulator-metal capacitors. Microelectronics Reliability, 83:242-248, 2018. [doi]
@article{JuanLCKWS18,
title = {2 dielectric layer sputtered with TiN or ZrN for sandwich-like metal-insulator-metal capacitors},
author = {P. C. Juan and K. C. Lin and H. Y. Chu and Y.-C. Kuo and H. W. Wang and T. Y. Shih},
year = {2018},
doi = {10.1016/j.microrel.2017.06.017},
url = {https://doi.org/10.1016/j.microrel.2017.06.017},
researchr = {https://researchr.org/publication/JuanLCKWS18},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {83},
pages = {242-248},
}