Kiran Junagal, R. S. Meena. Design and simulation of microstage having PZT MEMS actuator for 3D movement. In 2016 International Conference on Advances in Computing, Communications and Informatics, ICACCI 2016, Jaipur, India, September 21-24, 2016. pages 2180-2185, IEEE, 2016. [doi]
Abstract is missing.