Muthukkumar S. Kadavasal, Abhijit Chandra, Sutee Eamkajornsiri, Ashraf-F. Bastawros. Yield improvement via minimisation of step height non-uniformity in chemical mechanical planarisation (CMP) with pressure and velocity as control variables. IJMTM, 7(5/6):467-489, 2005. [doi]
@article{KadavasalCEB05,
title = {Yield improvement via minimisation of step height non-uniformity in chemical mechanical planarisation (CMP) with pressure and velocity as control variables},
author = {Muthukkumar S. Kadavasal and Abhijit Chandra and Sutee Eamkajornsiri and Ashraf-F. Bastawros},
year = {2005},
doi = {10.1504/IJMTM.2005.007698},
url = {http://dx.doi.org/10.1504/IJMTM.2005.007698},
researchr = {https://researchr.org/publication/KadavasalCEB05},
cites = {0},
citedby = {0},
journal = {IJMTM},
volume = {7},
number = {5/6},
pages = {467-489},
}