Tomoaki Kageyama, Koichi Shinozaki, Lan Zhang, Jian Lu, Hideki Takaki, Sang-Seok Lee. An ohmic contact type RF-MEMS switch having Au-Au/CNTs contacts. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 287-290, IEEE, 2017. [doi]
Abstract is missing.