Andrew B. Kahng, Y. C. Pati. Subwavelength optical lithography: challenges and impact on physical design. In ISPD. pages 112-119, 1999. [doi]
@inproceedings{KahngP99,
title = {Subwavelength optical lithography: challenges and impact on physical design},
author = {Andrew B. Kahng and Y. C. Pati},
year = {1999},
doi = {10.1145/299996.300035},
url = {http://doi.acm.org/10.1145/299996.300035},
tags = {C++, design},
researchr = {https://researchr.org/publication/KahngP99},
cites = {0},
citedby = {0},
pages = {112-119},
booktitle = {ISPD},
}