Nitin S. Kale. Tutorial T4: MEMS: Design, Fabrication, and their Applications as Chemical and Biosensors. In 28th International Conference on VLSI Design, VLSID 2015, Bangalore, India, January 3-7, 2015. pages 8-9, IEEE Computer Society, 2015. [doi]
@inproceedings{Kale15,
title = {Tutorial T4: MEMS: Design, Fabrication, and their Applications as Chemical and Biosensors},
author = {Nitin S. Kale},
year = {2015},
doi = {10.1109/VLSID.2015.112},
url = {http://doi.ieeecomputersociety.org/10.1109/VLSID.2015.112},
researchr = {https://researchr.org/publication/Kale15},
cites = {0},
citedby = {0},
pages = {8-9},
booktitle = {28th International Conference on VLSI Design, VLSID 2015, Bangalore, India, January 3-7, 2015},
publisher = {IEEE Computer Society},
isbn = {978-1-4799-6658-5},
}