Identification for complicated shape objects by using stochastic fractal variables - categorizing dust particles on LSI wafer surface

Masayoshi Kamijo, Shin'ichi Aihara. Identification for complicated shape objects by using stochastic fractal variables - categorizing dust particles on LSI wafer surface. Systems and Computers in Japan, 26(4):74-83, 1995. [doi]

Abstract

Abstract is missing.