Fabrication and Characterization of Lateral-Directional Actuator Using Pb(Zr, Ti)O_3 Thin Films

Kensuke Kanda, Yu Akashi, Takashi Saito, T. Fujita, K. Higuchi, Kazusuke Maenaka. Fabrication and Characterization of Lateral-Directional Actuator Using Pb(Zr, Ti)O_3 Thin Films. In 2012 Fifth International Conference on Emerging Trends in Engineering and Technology, Himeji, Japan, November 5-7, 2012. pages 124-127, IEEE, 2012. [doi]

Authors

Kensuke Kanda

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Yu Akashi

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Takashi Saito

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T. Fujita

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K. Higuchi

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Kazusuke Maenaka

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