Kensuke Kanda, Yu Akashi, Takashi Saito, T. Fujita, K. Higuchi, Kazusuke Maenaka. Fabrication and Characterization of Lateral-Directional Actuator Using Pb(Zr, Ti)O_3 Thin Films. In 2012 Fifth International Conference on Emerging Trends in Engineering and Technology, Himeji, Japan, November 5-7, 2012. pages 124-127, IEEE, 2012. [doi]
Abstract is missing.