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Investigation of MEMS Single Turn Meander-Shaped Silicon Carbide Piezoresistive Pressure Sensor on a Clamped Circular Diaphragm for High Pressure Harsh Environment Applications

Dadasikandar Kanekal, Sumit Kumar Jindal. Investigation of MEMS Single Turn Meander-Shaped Silicon Carbide Piezoresistive Pressure Sensor on a Clamped Circular Diaphragm for High Pressure Harsh Environment Applications. Journal of Circuits, Systems, and Computers, 33(4), March 2024. [doi]

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Dadasikandar Kanekal

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Sumit Kumar Jindal

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