Investigation of MEMS Single Turn Meander-Shaped Silicon Carbide Piezoresistive Pressure Sensor on a Clamped Circular Diaphragm for High Pressure Harsh Environment Applications

Dadasikandar Kanekal, Sumit Kumar Jindal. Investigation of MEMS Single Turn Meander-Shaped Silicon Carbide Piezoresistive Pressure Sensor on a Clamped Circular Diaphragm for High Pressure Harsh Environment Applications. Journal of Circuits, Systems, and Computers, 33(4), March 2024. [doi]

@article{KanekalJ24,
  title = {Investigation of MEMS Single Turn Meander-Shaped Silicon Carbide Piezoresistive Pressure Sensor on a Clamped Circular Diaphragm for High Pressure Harsh Environment Applications},
  author = {Dadasikandar Kanekal and Sumit Kumar Jindal},
  year = {2024},
  month = {March},
  doi = {10.1142/S0218126624500658},
  url = {https://doi.org/10.1142/S0218126624500658},
  researchr = {https://researchr.org/publication/KanekalJ24},
  cites = {0},
  citedby = {0},
  journal = {Journal of Circuits, Systems, and Computers},
  volume = {33},
  number = {4},
}