Minami Kaneko, Yuya Niki, Kenji Takeda, Megumi Aibara, Fumio Uchikoba. Development of MEMS Flow Path for Miniature Waste Heat Utilization Generator. In IECON 2022 - 48th Annual Conference of the IEEE Industrial Electronics Society, Brussels, Belgium, October 17-20, 2022. pages 1-6, IEEE, 2022. [doi]
Abstract is missing.