Structural and Electrical Properties of High Temperature Polycrystalline Silicon Films on Molybdenum Substrate

Hyun-il Kang, Won-Suk Choi, Yeon-ho Jung, Hyun-Suk Hwang, Do Young Kim. Structural and Electrical Properties of High Temperature Polycrystalline Silicon Films on Molybdenum Substrate. In Tai-Hoon Kim, Hojjat Adeli, Adrian Stoica, Byeong Ho Kang, editors, Control and Automation, and Energy System Engineering - International Conferences, CA and CES3 2011, Held as Part of the Future Generation Information Technology Conference, FGIT 2011, in Conjunction with GDC 2011, Jeju Island, Korea, December 8-10, 2011. Proceedings. Volume 256 of Communications in Computer and Information Science, pages 96-101, Springer, 2011. [doi]

Abstract

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