Evaluating the reliability level of virtual metrology results for flexible process control: a novelty detection-based approach

Pilsung Kang, Dongil Kim, Sungzoon Cho. Evaluating the reliability level of virtual metrology results for flexible process control: a novelty detection-based approach. Pattern Anal. Appl., 17(4):863-881, 2014. [doi]

Abstract

Abstract is missing.