Development of a Flexible Integrated Self-Calibrating MEMS Pressure Sensor Using a Liquid-to-Vapor Phase Change

Yuhong Kang, Scott Mouring, Albrey de Clerck, Shuo Mao, Wing Ng, Hang Ruan. Development of a Flexible Integrated Self-Calibrating MEMS Pressure Sensor Using a Liquid-to-Vapor Phase Change. Sensors, 22(24):9737, 2022. [doi]

Abstract

Abstract is missing.