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Low stress TAN thin film Development for MEMS/Sensor electrode Application

Xiaoxu Kang, Qingyun Zuo, Chao Yuan, Shoumian Chen, Yuhang Zhao. Low stress TAN thin film Development for MEMS/Sensor electrode Application. Journal of Circuits, Systems, and Computers, 22(9), 2013. [doi]

Authors

Xiaoxu Kang

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Qingyun Zuo

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Chao Yuan

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Shoumian Chen

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Yuhang Zhao

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