Xiaoxu Kang, Qingyun Zuo, Chao Yuan, Shoumian Chen, Yuhang Zhao. Low stress TAN thin film Development for MEMS/Sensor electrode Application. Journal of Circuits, Systems, and Computers, 22(9), 2013. [doi]
@article{KangZYCZ13,
title = {Low stress TAN thin film Development for MEMS/Sensor electrode Application},
author = {Xiaoxu Kang and Qingyun Zuo and Chao Yuan and Shoumian Chen and Yuhang Zhao},
year = {2013},
doi = {10.1142/S0218126613400173},
url = {http://dx.doi.org/10.1142/S0218126613400173},
researchr = {https://researchr.org/publication/KangZYCZ13},
cites = {0},
citedby = {0},
journal = {Journal of Circuits, Systems, and Computers},
volume = {22},
number = {9},
}