Yu-Ting Kao, Shi-Chung Chang, Chun-Ming Chang. Target setting with consideration of target-induced operation variability for performance improvement of semiconductor fabrication. In 2014 IEEE International Conference on Automation Science and Engineering, CASE 2014, New Taipei, Taiwan, August 18-22, 2014. pages 774-779, IEEE, 2014. [doi]
@inproceedings{KaoCC14-0,
title = {Target setting with consideration of target-induced operation variability for performance improvement of semiconductor fabrication},
author = {Yu-Ting Kao and Shi-Chung Chang and Chun-Ming Chang},
year = {2014},
doi = {10.1109/CoASE.2014.6899413},
url = {http://dx.doi.org/10.1109/CoASE.2014.6899413},
researchr = {https://researchr.org/publication/KaoCC14-0},
cites = {0},
citedby = {0},
pages = {774-779},
booktitle = {2014 IEEE International Conference on Automation Science and Engineering, CASE 2014, New Taipei, Taiwan, August 18-22, 2014},
publisher = {IEEE},
}