Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique

Pin-Hsu Kao, Ching-Liang Dai, Cheng-Chih Hsu, Chyan-Chyi Wu. Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique. Sensors, 9(8):6219-6231, 2009. [doi]

Abstract

Abstract is missing.