Wen-Hsing Kao, Jason C. Hung, Victoria Hsu. Using Data Mining Techniques in Development of MURA Geometric Prediction Module for Large Area Photomask. In Proceedings of the 3rd IEEE Asia-Pacific Services Computing Conference, APSCC 2008, Yilan, Taiwan, 9-12 December 2008. pages 957-962, IEEE, 2008. [doi]
Abstract is missing.