Testing MEMS

Jean-Michel Karam, Marcelo Lubaszewski, S. Blanton, Andrew Richardson. Testing MEMS. In 16th IEEE VLSI Test Symposium (VTS 98), 28 April - 1 May 1998, Princeton, NJ, USA. pages 320-321, IEEE Computer Society, 1998. [doi]

@inproceedings{KaramLBR98,
  title = {Testing MEMS},
  author = {Jean-Michel Karam and Marcelo Lubaszewski and S. Blanton and Andrew Richardson},
  year = {1998},
  url = {http://csdl2.computer.org/dl/proceedings/vts/1998/8436/00/84360320.pdf},
  tags = {testing},
  researchr = {https://researchr.org/publication/KaramLBR98},
  cites = {0},
  citedby = {0},
  pages = {320-321},
  booktitle = {16th IEEE VLSI Test Symposium (VTS  98), 28 April - 1 May 1998, Princeton, NJ, USA},
  publisher = {IEEE Computer Society},
  isbn = {0-8186-8436-4},
}