Optimized design and process for making a DC voltage reference based on MEMS

Anu Kärkkäinen, Shakil A. Awan, Jukka Kyynäräinen, Panu Pekko, Aarne S. Oja, Heikki Seppä. Optimized design and process for making a DC voltage reference based on MEMS. IEEE T. Instrumentation and Measurement, 54(2):563-566, 2005. [doi]

@article{KarkkainenAKPOS05,
  title = {Optimized design and process for making a DC voltage reference based on MEMS},
  author = {Anu Kärkkäinen and Shakil A. Awan and Jukka Kyynäräinen and Panu Pekko and Aarne S. Oja and Heikki Seppä},
  year = {2005},
  doi = {10.1109/TIM.2004.843097},
  url = {http://dx.doi.org/10.1109/TIM.2004.843097},
  tags = {optimization, rule-based, design},
  researchr = {https://researchr.org/publication/KarkkainenAKPOS05},
  cites = {0},
  citedby = {0},
  journal = {IEEE T. Instrumentation and Measurement},
  volume = {54},
  number = {2},
  pages = {563-566},
}