Anu Kärkkäinen, Shakil A. Awan, Jukka Kyynäräinen, Panu Pekko, Aarne S. Oja, Heikki Seppä. Optimized design and process for making a DC voltage reference based on MEMS. IEEE T. Instrumentation and Measurement, 54(2):563-566, 2005. [doi]
Abstract is missing.