Study on self-sensing electrostatic suspension using a variable capacitor

T. Kato, Yuji Ishino, Masaya Takasaki, T. Mizuno. Study on self-sensing electrostatic suspension using a variable capacitor. In 11th IEEE International Workshop on Advanced Motion Control, AMC 2010, Nagaoka University of Technology, Nagaoka, Niigata, Japan, March 21st - 24th, 2010. pages 426-429, IEEE, 2010. [doi]

Authors

T. Kato

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Yuji Ishino

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Masaya Takasaki

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T. Mizuno

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