Hot spots suppression by high thermal conductivity film in thin-sub strate CMOS ICs for 3D integration

Fumiki Kato, Katsuya Kikuchi, Hiroshi Nakagawa, Masahiro Aoyagi. Hot spots suppression by high thermal conductivity film in thin-sub strate CMOS ICs for 3D integration. In Mitsumasa Koyanagi, Morihiro Kada, editors, 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31 - February 2, 2012. pages 1-4, IEEE, 2011. [doi]

Abstract

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