Design of a 2D MEMS micromirror with indirect static actuation

P. Kaupmann, S. Pinter, J. Franz, R. Streiter, T. Otto. Design of a 2D MEMS micromirror with indirect static actuation. In 2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017. pages 1-3, IEEE, 2017. [doi]

Abstract

Abstract is missing.