Observation and characterization of defects in HfO::2:: high-K gate dielectric layers

Vidya Kaushik, Martine Claes, Annelies Delabie, Sven Van Elshocht, Olivier Richard, Thierry Conard, Erika Rohr, Thomas Witters, Matty Caymax, Stefan De Gendt. Observation and characterization of defects in HfO::2:: high-K gate dielectric layers. Microelectronics Reliability, 45(5-6):798-801, 2005. [doi]

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