MEMS resonant mass sensor with enabled optical trapping - researchr publication authors

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Ethan G. Keeler, Peifeng Jing, Jingda Wu, Chen Zou, Lih Y. Lin. MEMS resonant mass sensor with enabled optical trapping. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 639-643, IEEE, 2017. [doi]

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