MEMS resonant mass sensor with enabled optical trapping

Ethan G. Keeler, Peifeng Jing, Jingda Wu, Chen Zou, Lih Y. Lin. MEMS resonant mass sensor with enabled optical trapping. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 639-643, IEEE, 2017. [doi]

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