Investigating stress measurement capabilities of GHz Scanning Acoustic Microscopy for 3D failure analysis

A. Khaled, S. Brand, M. Kögel, T. Appenroth, Ingrid De Wolf. Investigating stress measurement capabilities of GHz Scanning Acoustic Microscopy for 3D failure analysis. Microelectronics Reliability, 64:336-340, 2016. [doi]

@article{KhaledBKAW16,
  title = {Investigating stress measurement capabilities of GHz Scanning Acoustic Microscopy for 3D failure analysis},
  author = {A. Khaled and S. Brand and M. Kögel and T. Appenroth and Ingrid De Wolf},
  year = {2016},
  doi = {10.1016/j.microrel.2016.07.061},
  url = {http://dx.doi.org/10.1016/j.microrel.2016.07.061},
  researchr = {https://researchr.org/publication/KhaledBKAW16},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {64},
  pages = {336-340},
}