Effect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensing

A. Khaled, M. Raoof, Vladimir Cherman, K. Jans, M. Abbas, Sh. Ebrahim, G. Bryce, P. Verheyen, Ann Witvrouw, Ingrid De Wolf. Effect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensing. Microelectronics Reliability, 52(9-10):2272-2277, 2012. [doi]

Abstract

Abstract is missing.