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Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors

Imran Khan, Ahmad Rahbar Ranji, Gnanesh Nagesh, David S. K. Ting, Mohammed Jalal Ahamed. Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors. Sensors, 23(22):9234, November 2023. [doi]

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