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Hydrogen passivation effects under negative bias temperature instability stress in metal/silicon-oxide/silicon-nitride/silicon-oxide/silicon capacitors for flash memories

Hee-Dong Kim, Ho-Myoung An, Yujeong Seo, Yongjie Zhang, Jong-Sun Park, Tae-Geun Kim. Hydrogen passivation effects under negative bias temperature instability stress in metal/silicon-oxide/silicon-nitride/silicon-oxide/silicon capacitors for flash memories. Microelectronics Reliability, 50(1):21-25, 2010. [doi]

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