Dongjin Kim, Emrah Cimren, Robert Havey, Abbas K. Zaidi. Improving cluster tools performance using colored Petri nets in semiconductor manifacturing. In Oliver Rose, Adelinde M. Uhrmacher, editors, Winter Simulation Conference, WSC '12, Berlin, Germany, December 9-12, 2012. pages 205, WSC, 2012. [doi]
@inproceedings{KimCHZ12,
title = {Improving cluster tools performance using colored Petri nets in semiconductor manifacturing},
author = {Dongjin Kim and Emrah Cimren and Robert Havey and Abbas K. Zaidi},
year = {2012},
url = {http://dl.acm.org/citation.cfm?id=2430033},
researchr = {https://researchr.org/publication/KimCHZ12},
cites = {0},
citedby = {0},
pages = {205},
booktitle = {Winter Simulation Conference, WSC '12, Berlin, Germany, December 9-12, 2012},
editor = {Oliver Rose and Adelinde M. Uhrmacher},
publisher = {WSC},
}