Dongjin Kim, Emrah Cimren, Robert Havey, Abbas K. Zaidi. Improving cluster tools performance using colored Petri nets in semiconductor manifacturing. In Oliver Rose, Adelinde M. Uhrmacher, editors, Winter Simulation Conference, WSC '12, Berlin, Germany, December 9-12, 2012. pages 205, WSC, 2012. [doi]
Abstract is missing.