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Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Display Fabrication Process

Si-Jun Kim, Minsu Choi, Sang Ho Lee, Won-nyoung Jeong, Young Seok Lee, In-Ho Seong, Chul-Hee Cho, Dae Woong Kim, Shin-Jae You. Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Display Fabrication Process. Sensors, 23(5):2521, March 2023. [doi]

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