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Posters: Edge AI-Based Integrated Model Architecture for Optimization of Semiconductor ALD Processes: Real-Time Feedback and Model Update Framework for Thin Film Quality Control

Hyungkoo Kim, Chulseoung Chae, Byeolhee Sim, Dongsik Yoon, Jeonghoon Kang. Posters: Edge AI-Based Integrated Model Architecture for Optimization of Semiconductor ALD Processes: Real-Time Feedback and Model Update Framework for Thin Film Quality Control. In Ardalan Amiri Sani, Chenren Xu, Przemyslaw Pawelczak, Swarun Kumar, editors, Proceedings of the 23rd Annual International Conference on Mobile Systems, Applications and Services, MobiSys 2025, Hilton Anaheim, Anaheim, CA, USA, June 23-27, 2025. pages 597-598, ACM, 2025. [doi]

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