Methodology for Lithography Hotspot Detection using ResNet50V2 and Model soups

Su Min Kim, Jae Wook Jeon. Methodology for Lithography Hotspot Detection using ResNet50V2 and Model soups. In International Conference on Electronics, Information, and Communication, ICEIC 2024, Taipei, Taiwan, January 28-31, 2024. pages 1-4, IEEE, 2024. [doi]

Abstract

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