Fabrication of suspended thin film resonator for application of RF bandpass filter

Hyun-Ho Kim, Byeong Kwon Ju, Yun Hi Lee, Si Hyung Lee, Jeon Kook Lee, Soo-Won Kim. Fabrication of suspended thin film resonator for application of RF bandpass filter. Microelectronics Reliability, 44(2):237-243, 2004. [doi]

Abstract

Abstract is missing.